Xtirm-FC-300 概覽
Xtirm-FC-300 Overview
技術實力雄厚，專業(yè)的營銷設計團隊
Strengthen service. sales & marketing, design expertise
質量認證
Manufacture cleaners under ISO 9001 quality control IS09001
操作簡便、維護成本低
Reduce overhead costs and more efficient operations
交貨周期短，技術支持迅捷
Provide shorter lead-time and improvedtechnical support
半導體行業(yè)客戶認可度高
Highly focused on repeat orders from existing semi customers
Xtrim-FC-300 介紹
Xtrim-FC-300 introduction
在清洗機行業(yè)超25年經驗
Over 25 years of experience in cleaning equipment business
在上海，蘇州有完善的服務和銷售團隊
Full sales and warranty support in Shanghai
自主研發(fā)設計，生產、服務，可用于片盒、FOUP、光罩盒清洗
Designed,manufactured and serviced box/-FOUP/FOSB/MASKPOD cleaners
產品特點
Features
3rd Generation process cleaner for 50mm - 300m wafer handing products
針對2-12寸晶圓的第三代清洗設備
High-purity materials, PP, PVDF 316 suS, etc
適用于各種材質盒子，包括PP、PVD......
Front load/unload, or optional front load & back unload ftor bulk mounting
前載/前卸、前載/后卸等多種設計模式
Standard heated blower drying usingfab air
標準廠務熱空氣干量
Optional heated CDAN2 drving
熱CDA、N2干燥可選
Standard ambient DIW cleaning
標準DIW清洗容器
Small footprint ideal for cleanroom
無塵室盡可能小的占地設計
Maximum throughput in the industry
產能盡可能大的設計
Outstanding local support and spare parts avalilbility
技術支持實力雄厚，備件齊全
Lowestmaintenance,high MTBF &uptime
維護成本低，故障率低
-Manually load shipping boxes, Mask Pod or other wafer handling products in the custom-designed racks in the machine
手動取放盒子，可根據客戶要求設計方案
-Washing, rinsing and drving are fuilly automated when the operator verifies that the parts are securely loaded on all four racks and the machine door closed properly, before pressing the GO button on thetouch screen
自動化洗烘，一鍵啟動
All spinning speeds and directions will be automatically controled through the HMI
人機界面控制參數